اثر استفاده از اسید استیک در محلول پیش ماده بر ویژگی‌های فیزیکی لایه‌های نازک اکسید روی آلاییده با آلومینیوم رشد یافته به روش گرما کافت

نوع مقاله : مقاله پژوهشی

نویسندگان

1 گروه فیزیک، دانشگاه صنعتی خاتم الانبیاء بهبهان، ایران

2 گروه فیزیک، دانشکده علوم، دانشگاه گیلان، رشت، ایران

چکیده

لایه‌های نازک اکسید روی آلاییده با آلومینیوم (AZO) روی زیرلایه شیشه‌ای به روش گرما کافت لایه‌نشانی شدند. مقدار اسید استیک موجود در محلول پیش ماده از 0 تا ml 4 با گام ml 1 تغییر داده شد. این موضوع باعث تغییرات قابل‌توجهی در ویژگی­های فیزیکی لایه‌ها شد. در همه لایه‌ها، صفحه بلوری (002) غالب بود، اما با افزایش اسید استیک کمی از شدت قله این صفحه کاسته شد. مقادیر برآورد شده برای اندازه بلورک و کرنش با افزایش اسید استیک به ترتیب از 59 تا nm 116 و 3-10×82/1 تا 3-10×47/2 افزایش یافت. با ورود کمترین مقدار اسید استیک به محلول پیش ماده (ml 1)، مقاومت ویژه لایه نازک AZO به طور چشمگیری کاهش یافت (از 10-1×08/2 به Ω.cm 10-2×01/2). کمترین مقاومت ویژه و همچنین بالاترین شفافیت مربوط به لایه تهیه شده با ml 2 اسید استیک بود که منجر به شاخص شایستگی 1-Ω 10-4×86/5 گردید.

کلیدواژه‌ها

عنوان مقاله [English]

Influence of using acetic acid in the precursor solution on the physical properties of spray-deposited Al doped zinc oxide thin films

نویسندگان [English]

  • Hassan Zare Asl 1
  • Seyed Mohammad Rozati 2
1 Department of physics, Behbahan Khatam Alanbia University of Technology, Behbahan, Iran
2 Department of physics, Facelty of sciences, University of Guilan, Guilan, Rasht, Iran
چکیده [English]

Al-doped zinc oxide (AZO) thin films were spray-deposited onto soda lime glass. The amount of acetic acid was changed from 0 to 4 ml in the precursor with 1 ml step. As a result, the physical characteristics of the prepared AZO thin films were considerably changed. Although the (002) plane was dominant in all the prepared AZO films, the intensity of the related peak was slightly declined with acetic acid. Both the estimated crystallite size and strain elevated with acetic acid increase from 59 to 116 nm and 1.82×10-3 to 2.47×10-3, respectively. As soon as the lowest amount of acetic acid was added to the precursor solution (1 ml), the resistivity of the spray-deposited AZO thin film met a drastic reduction (from 2.08×10-1 Ω.cm to 2.01×10-2 Ω.cm). the lowest resistivity as well as the highest transparency were belonged to the AZO film with 2 ml acetic acid which result in 5.86×10-4 Ω-1 figure of merit.

کلیدواژه‌ها [English]

  • AZO thin film
  • acetic acid
  • precursor solution
  • physical characteristics
  • Spray Pyrolysis

مراجع

  1. [1] Djessas K., Bouchama I., Gauffier J.L., Ayadi Z.B., "Effects of indium concentration on the properties of In-doped ZnO films: Applications to silicon wafer solar cells", Thin Solid Films, 555 (2014) 28-32. [DOI:10.1016/j.tsf.2013.08.109]
  2. [1] Djessas K., Bouchama I., Gauffier J.L., Ayadi Z.B., "Effects of indium concentration on the properties of In-doped ZnO films: Applications to silicon wafer solar cells", Thin Solid Films, 555 (2014) 28-32. [DOI:10.1016/j.tsf.2013.08.109]
  3. [2] Asl H.Z., Rozati S.M., "Some physical properties of n-IZO/p-CuO thin film heterojunction diodes completely made by spray pyrolysis", Journal of Materials Science: Materials in Electronics, 29 (2018) 4365-4372. [DOI:10.1007/s10854-017-8385-1]
  4. [2] Asl H.Z., Rozati S.M., "Some physical properties of n-IZO/p-CuO thin film heterojunction diodes completely made by spray pyrolysis", Journal of Materials Science: Materials in Electronics, 29 (2018) 4365-4372. [DOI:10.1007/s10854-017-8385-1]
  5. [3] Belaidi A., Chaqour S.M., Gorochov O., Neumann-Spallart M., "Photoelectrochemical and physical properties of titanium dioxide films obtained by aerosol pyrolysis", Materials Research Bulletin, 39 (2004) 599-608. [DOI:10.1016/j.materresbull.2003.12.012]
  6. [3] Belaidi A., Chaqour S.M., Gorochov O., Neumann-Spallart M., "Photoelectrochemical and physical properties of titanium dioxide films obtained by aerosol pyrolysis", Materials Research Bulletin, 39 (2004) 599-608. [DOI:10.1016/j.materresbull.2003.12.012]
  7. [4] Chu J., Li X., Cheng Y., Xiong S., "Electrochromic properties of Prussian Blue nanocube film directly grown on FTO substrates by hydrothermal method", Materials Letters, 258 (2020) 126782. [DOI:10.1016/j.matlet.2019.126782]
  8. [4] Chu J., Li X., Cheng Y., Xiong S., "Electrochromic properties of Prussian Blue nanocube film directly grown on FTO substrates by hydrothermal method", Materials Letters, 258 (2020) 126782. [DOI:10.1016/j.matlet.2019.126782]
  9. [5] Asl H.Z., Rozati S.M., "High-quality spray-deposited fluorine-doped tin oxide: effect of film thickness on structural, morphological, electrical, and optical properties", Applied Physics A, 125 (2019) 689. [DOI:10.1007/s00339-019-2943-8]
  10. [5] Asl H.Z., Rozati S.M., "High-quality spray-deposited fluorine-doped tin oxide: effect of film thickness on structural, morphological, electrical, and optical properties", Applied Physics A, 125 (2019) 689. [DOI:10.1007/s00339-019-2943-8]
  11. [6] Pammi S.V.N., Chanda A., Seong N.-J., Yoon S.-G., "Growth of high-quality ITO thin films at low temperature by tuning the oxygen flow rate using the nano-cluster deposition (NCD) technique", Chemical Physics Letters, 490 (2010) 234-237.

    https://doi.org/10.1016/j.cplett.2010.03.035 [DOI:https://doi.org/10.1016/j.cplett.2010.03.035]
  12. [6] Pammi S.V.N., Chanda A., Seong N.-J., Yoon S.-G., "Growth of high-quality ITO thin films at low temperature by tuning the oxygen flow rate using the nano-cluster deposition (NCD) technique", Chemical Physics Letters, 490 (2010) 234-237.

    https://doi.org/10.1016/j.cplett.2010.03.035 [DOI:https://doi.org/10.1016/j.cplett.2010.03.035]
  13. [7] Asl H.Z., Rozati S.M., "Influence of texture coefficient on the electrical properties of spray-deposited fluorine-doped tin oxide thin film", Journal of Materials Science: Materials in Electronics, 32 (2021) 1668-1676. [DOI:10.1007/s10854-020-04936-w]
  14. [7] Asl H.Z., Rozati S.M., "Influence of texture coefficient on the electrical properties of spray-deposited fluorine-doped tin oxide thin film", Journal of Materials Science: Materials in Electronics, 32 (2021) 1668-1676. [DOI:10.1007/s10854-020-04936-w]
  15. [8] Asl H.Z., Rozati S.M., "High-Performance Spray-Deposited Indium Doped ZnO Thin Film: Structural, Morphological, Electrical, Optical, and Photoluminescence Study", Journal of Electronic Materials, 47 (2018) 3568-3576. [DOI:10.1007/s11664-018-6201-1]
  16. [8] Asl H.Z., Rozati S.M., "High-Performance Spray-Deposited Indium Doped ZnO Thin Film: Structural, Morphological, Electrical, Optical, and Photoluminescence Study", Journal of Electronic Materials, 47 (2018) 3568-3576. [DOI:10.1007/s11664-018-6201-1]
  17. [9] Malekiyan M., Fadavieslam M., Ardyanian m., "Investigation of the structural, optical and gas sensing properties of Aluminum doped zinc -oxide nanoparticles synthesized by solvo-thermal method", Iranian Journal of Crystallography and Mineralogy, 27 (2019) 975-984. [DOI:10.29252/ijcm.27.4.975]
  18. [9] Malekiyan M., Fadavieslam M., Ardyanian m., "Investigation of the structural, optical and gas sensing properties of Aluminum doped zinc -oxide nanoparticles synthesized by solvo-thermal method", Iranian Journal of Crystallography and Mineralogy, 27 (2019) 975-984. [DOI:10.29252/ijcm.27.4.975]
  19. [10] Karzazi O., Soussi L., Louardi A., El Bachiri A., Khaidar M., Monkade M., Erguig H., Taleb M., "Transparent conducting properties of Mg and Al co-doped ZnO thin films deposited by spray pyrolysis technique", Superlattices and Microstructures, 127 (2019) 61-65. [DOI:10.1016/j.spmi.2018.03.011]
  20. [10] Karzazi O., Soussi L., Louardi A., El Bachiri A., Khaidar M., Monkade M., Erguig H., Taleb M., "Transparent conducting properties of Mg and Al co-doped ZnO thin films deposited by spray pyrolysis technique", Superlattices and Microstructures, 127 (2019) 61-65. [DOI:10.1016/j.spmi.2018.03.011]
  21. [11] Pakniyat S., Motevalizadeh L., Jami S., "The effect of Ga-doping on the structural and optical properties of ZnO thin films prepared by spray pyrolysis (in Persian)", Iranian Journal of Crystallography and Mineralogy, 27 (2019) 747-752. [DOI:10.29252/ijcm.27.3.747]
  22. [11] Pakniyat S., Motevalizadeh L., Jami S., "The effect of Ga-doping on the structural and optical properties of ZnO thin films prepared by spray pyrolysis (in Persian)", Iranian Journal of Crystallography and Mineralogy, 27 (2019) 747-752. [DOI:10.29252/ijcm.27.3.747]
  23. [12] Arca E., Fleischer K., Shvets I., "Tuning the crystallographic, morphological, optical and electrical properties of ZnO:Al grown by spray pyrolysis", Thin Solid Films, 555 (2014) 9-12. [DOI:10.1016/j.tsf.2013.08.110]
  24. [12] Arca E., Fleischer K., Shvets I., "Tuning the crystallographic, morphological, optical and electrical properties of ZnO:Al grown by spray pyrolysis", Thin Solid Films, 555 (2014) 9-12. [DOI:10.1016/j.tsf.2013.08.110]
  25. [13] Parvan,A., Mazloom J., Esmaeili Ghodsi F., Safari M., "Investigation of the effect of amino-alcohol stabilizers on crystal structure, band gap and blue luminescence of Cu-doped ZnO nanoparticles prepared by sol-gel method", Iranian Journal of Crystallography and Mineralogy, 29 (2021) 257-266. [DOI:10.52547/ijcm.29.1.257]
  26. [13] Parvan,A., Mazloom J., Esmaeili Ghodsi F., Safari M., "Investigation of the effect of amino-alcohol stabilizers on crystal structure, band gap and blue luminescence of Cu-doped ZnO nanoparticles prepared by sol-gel method", Iranian Journal of Crystallography and Mineralogy, 29 (2021) 257-266. [DOI:10.52547/ijcm.29.1.257]
  27. [14] Gahtar A., Rahal A., Benhaoua B., Benramache S., "A comparative study on structural and optical properties of ZnO and Al-doped ZnO thin films obtained by ultrasonic spray method using different solvents", Optik, 125 (2014) 3674-3678. [DOI:10.1016/j.ijleo.2014.01.078]
  28. [14] Gahtar A., Rahal A., Benhaoua B., Benramache S., "A comparative study on structural and optical properties of ZnO and Al-doped ZnO thin films obtained by ultrasonic spray method using different solvents", Optik, 125 (2014) 3674-3678. [DOI:10.1016/j.ijleo.2014.01.078]
  29. [15] Asl H.Z., Rozati S.M., "Structural, morphological, electrical, optical, and photoluminescence properties of spray-deposited ZnO thin film: effect of hydrochloric and acetic acids in the precursor", Journal of Materials Science: Materials in Electronics, 31 (2020) 2537-2543. [DOI:10.1007/s10854-019-02790-z]
  30. [15] Asl H.Z., Rozati S.M., "Structural, morphological, electrical, optical, and photoluminescence properties of spray-deposited ZnO thin film: effect of hydrochloric and acetic acids in the precursor", Journal of Materials Science: Materials in Electronics, 31 (2020) 2537-2543. [DOI:10.1007/s10854-019-02790-z]
  31. [16] Edinger S., Bekacz J., Richter M., Hamid R., Wibowo R.A., Peić A., Dimopoulos T., "Influence of the acetic acid concentration on the growth of zinc oxide thin films prepared by spray pyrolysis of aqueous solutions", Thin Solid Films, 594 (2015) 238-244. [DOI:10.1016/j.tsf.2015.04.027]
  32. [16] Edinger S., Bekacz J., Richter M., Hamid R., Wibowo R.A., Peić A., Dimopoulos T., "Influence of the acetic acid concentration on the growth of zinc oxide thin films prepared by spray pyrolysis of aqueous solutions", Thin Solid Films, 594 (2015) 238-244. [DOI:10.1016/j.tsf.2015.04.027]
  33. [17] Jiao B.C., Zhang X.D., Wei C.C., Sun J., Huang Q., Zhao Y., "Effect of acetic acid on ZnO:In transparent conductive oxide prepared by ultrasonic spray pyrolysis", Thin Solid Films, 520 (2011) 1323-1329. [DOI:10.1016/j.tsf.2011.04.152]
  34. [17] Jiao B.C., Zhang X.D., Wei C.C., Sun J., Huang Q., Zhao Y., "Effect of acetic acid on ZnO:In transparent conductive oxide prepared by ultrasonic spray pyrolysis", Thin Solid Films, 520 (2011) 1323-1329. [DOI:10.1016/j.tsf.2011.04.152]
  35. [18] Rodríguez-Báez J., Maldonado A., Castañeda L., Delgado G.T., Castanedo-Pérez R., de la L. Olvera M., "On the effect of acetic acid on physical properties of chemically sprayed fluorine-doped ZnO thin films", Thin Solid Films, 515 (2007) 8689-8694. [DOI:10.1016/j.tsf.2007.03.132]
  36. [18] Rodríguez-Báez J., Maldonado A., Castañeda L., Delgado G.T., Castanedo-Pérez R., de la L. Olvera M., "On the effect of acetic acid on physical properties of chemically sprayed fluorine-doped ZnO thin films", Thin Solid Films, 515 (2007) 8689-8694. [DOI:10.1016/j.tsf.2007.03.132]
  37. [19] Mahmoudi T., Masoudi M., "An experimental and theoretical study on the physical properties of Al doped ZnO thin films (in Persian)", Iranian Journal of Crystallography and Mineralogy, 27 (2019) 487-494. [DOI:10.29252/ijcm.27.2.487]
  38. [19] Mahmoudi T., Masoudi M., "An experimental and theoretical study on the physical properties of Al doped ZnO thin films (in Persian)", Iranian Journal of Crystallography and Mineralogy, 27 (2019) 487-494. [DOI:10.29252/ijcm.27.2.487]
  39. [20] Kurtaran S., "Al doped ZnO thin films obtained by spray pyrolysis technique: Influence of different annealing time", Optical Materials, 114 (2021) 110908. [DOI:10.1016/j.optmat.2021.110908]
  40. [20] Kurtaran S., "Al doped ZnO thin films obtained by spray pyrolysis technique: Influence of different annealing time", Optical Materials, 114 (2021) 110908. [DOI:10.1016/j.optmat.2021.110908]
  41. [21] Asl H.Z., Rozati S.M., "Spray-deposited CuO:In2O3 nanocomposite thin film: Enhancement in electrochemical performance", Journal of Alloys and Compounds, 928 (2022) 167211. [DOI:10.1016/j.jallcom.2022.167211]
  42. [21] Asl H.Z., Rozati S.M., "Spray-deposited CuO:In2O3 nanocomposite thin film: Enhancement in electrochemical performance", Journal of Alloys and Compounds, 928 (2022) 167211. [DOI:10.1016/j.jallcom.2022.167211]
  43. [22] Calnan S., Tiwari A.N., "High mobility transparent conducting oxides for thin film solar cells", Thin Solid Films, 518 (2010) 1839-1849. [DOI:10.1016/j.tsf.2009.09.044]
  44. [22] Calnan S., Tiwari A.N., "High mobility transparent conducting oxides for thin film solar cells", Thin Solid Films, 518 (2010) 1839-1849. [DOI:10.1016/j.tsf.2009.09.044]
  45. [23] Zhang D.H., Ma H.L., "Scattering mechanisms of charge carriers in transparent conducting oxide films", Appl. Phys. A, 62 (1996) 487-492.

    https://doi.org/10.1007/BF01567122 [DOI:10.1007/bf01567122]
  46. [23] Zhang D.H., Ma H.L., "Scattering mechanisms of charge carriers in transparent conducting oxide films", Appl. Phys. A, 62 (1996) 487-492.

    https://doi.org/10.1007/BF01567122 [DOI:10.1007/bf01567122]
  47. [24] Wang J.T., Shi X.L., Liu W.W., Zhong X.H., Wang J.N., Pyrah L., Sanderson K.D., Ramsey P.M., Hirata M., Tsuri K., "Influence of Preferred Orientation on the Electrical Conductivity of Fluorine-Doped Tin Oxide Films", Scientific reports, 4 (2014) 3679. [DOI:10.1038/srep03679]
  48. [24] Wang J.T., Shi X.L., Liu W.W., Zhong X.H., Wang J.N., Pyrah L., Sanderson K.D., Ramsey P.M., Hirata M., Tsuri K., "Influence of Preferred Orientation on the Electrical Conductivity of Fluorine-Doped Tin Oxide Films", Scientific reports, 4 (2014) 3679. [DOI:10.1038/srep03679]
  49. [25] Hadjeris L., Herissi L., Assouar M.B., Easwarakhanthan T., Bougdira J., Attaf N., Aida M.S., "Transparent and conducting ZnO films grown by spray pyrolysis", Semiconductor Science and Technology, 24 (2009) 035006. [DOI:10.1088/0268-1242/24/3/035006]
  50. [25] Hadjeris L., Herissi L., Assouar M.B., Easwarakhanthan T., Bougdira J., Attaf N., Aida M.S., "Transparent and conducting ZnO films grown by spray pyrolysis", Semiconductor Science and Technology, 24 (2009) 035006. [DOI:10.1088/0268-1242/24/3/035006]
  51. [26] Garcés F.A., Budini N., Arce R.D., Schmidt J.A., "Effect of thickness on structural and electrical properties of Al-doped ZnO films", Thin Solid Films, 574 (2015) 162-168. [DOI:10.1016/j.tsf.2014.12.013]
  52. [26] Garcés F.A., Budini N., Arce R.D., Schmidt J.A., "Effect of thickness on structural and electrical properties of Al-doped ZnO films", Thin Solid Films, 574 (2015) 162-168. [DOI:10.1016/j.tsf.2014.12.013]
  53. [27] Babu B.J., Velumani S., Arenas-Alatorre J., Kassiba A., Chavez J., Park H., Hussain S.Q., Yi J., Asomoza, R., "Structural Properties of Ultrasonically Sprayed Al-Doped ZnO (AZO) Thin Films: Effect of ZnO Buffer Layer on AZO", Journal of Electronic Materials, 44 (2014) 699-705. [DOI:10.1007/s11664-014-3541-3]
  54. [27] Babu B.J., Velumani S., Arenas-Alatorre J., Kassiba A., Chavez J., Park H., Hussain S.Q., Yi J., Asomoza, R., "Structural Properties of Ultrasonically Sprayed Al-Doped ZnO (AZO) Thin Films: Effect of ZnO Buffer Layer on AZO", Journal of Electronic Materials, 44 (2014) 699-705. [DOI:10.1007/s11664-014-3541-3]
  55. [28] Hassanien A.S., Akl A.A., "Effect of Se addition on optical and electrical properties of chalcogenide CdSSe thin films", Superlattices and Microstructures, 89 (2016) 153-169. [DOI:10.1016/j.spmi.2015.10.044]
  56. [28] Hassanien A.S., Akl A.A., "Effect of Se addition on optical and electrical properties of chalcogenide CdSSe thin films", Superlattices and Microstructures, 89 (2016) 153-169. [DOI:10.1016/j.spmi.2015.10.044]
  57. [29] Fadavieslam M.R., "Deposition and characterization of SnO2:Sb thin films fabricated by the spray pyrolysis method (in Persian)", Iranian Journal of Crystallography and Mineralogy, 27 (2019) 739-746. [DOI:10.29252/ijcm.27.3.739]
  58. [29] Fadavieslam M.R., "Deposition and characterization of SnO2:Sb thin films fabricated by the spray pyrolysis method (in Persian)", Iranian Journal of Crystallography and Mineralogy, 27 (2019) 739-746. [DOI:10.29252/ijcm.27.3.739]
  59. [30] Tajabor N., Alinejad M.R., Iranmanesh P., "Preparation of SrTiO3 thin films by spray pyrolysis technique and study of their structural and optical properties (in Persian)", Iranian Journal of Crystallography and Mineralogy, 16 (2008) 225-232.
  60. [30] Tajabor N., Alinejad M.R., Iranmanesh P., "Preparation of SrTiO3 thin films by spray pyrolysis technique and study of their structural and optical properties (in Persian)", Iranian Journal of Crystallography and Mineralogy, 16 (2008) 225-232.
  61. [31] Barnasas A., Kanistras N., Ntagkas A., Anyfantis D.I., Stamatelatos A., Kapaklis V., Bouropoulos N., Mystiridou E., Poulopoulos P., Garoufalis C.S., Baskoutas S., "Quantum confinement effects of thin ZnO films by experiment and theory", Physica E: Low-dimensional Systems and Nanostructures, 120 (2020) 114072. [DOI:10.1016/j.physe.2020.114072]
  62. [31] Barnasas A., Kanistras N., Ntagkas A., Anyfantis D.I., Stamatelatos A., Kapaklis V., Bouropoulos N., Mystiridou E., Poulopoulos P., Garoufalis C.S., Baskoutas S., "Quantum confinement effects of thin ZnO films by experiment and theory", Physica E: Low-dimensional Systems and Nanostructures, 120 (2020) 114072. [DOI:10.1016/j.physe.2020.114072]
  63. [32] Javadian A., Fadavieslsm M.R., "Effect of substrate temperatures, spray rates, solution volumes, and nickel concentration on structural and optical properties of NiO thin films prepared by spray pyrolysis", Iranian Journal of Crystallography and Mineralogy, 31 (2023) 165-182. [DOI:10.52547/ijcm.31.1.165]
  64. [32] Javadian A., Fadavieslsm M.R., "Effect of substrate temperatures, spray rates, solution volumes, and nickel concentration on structural and optical properties of NiO thin films prepared by spray pyrolysis", Iranian Journal of Crystallography and Mineralogy, 31 (2023) 165-182. [DOI:10.52547/ijcm.31.1.165]
  65. [33] Edinger S., Bansal N., Bauch M., Wibowo R.A., Újvári G., Hamid R., Trimmel G., Dimopoulos T., "Highly transparent and conductive indium-doped zinc oxide films deposited at low substrate temperature by spray pyrolysis from water-based solutions", Journal of Materials Science, 52 (2017) 8591-8602. [DOI:10.1007/s10853-017-1084-8]
  66. [33] Edinger S., Bansal N., Bauch M., Wibowo R.A., Újvári G., Hamid R., Trimmel G., Dimopoulos T., "Highly transparent and conductive indium-doped zinc oxide films deposited at low substrate temperature by spray pyrolysis from water-based solutions", Journal of Materials Science, 52 (2017) 8591-8602. [DOI:10.1007/s10853-017-1084-8]
  67. [34] Shinde S.S., Shinde P.S., Pawar S.M., Moholkar A.V., Bhosale C.H., Rajpure K.Y., "Physical properties of transparent and conducting sprayed fluorine doped zinc oxide thin films", Solid State Sciences, 10 (2008) 1209-1214. [DOI:10.1016/j.solidstatesciences.2007.11.031]
  68. [34] Shinde S.S., Shinde P.S., Pawar S.M., Moholkar A.V., Bhosale C.H., Rajpure K.Y., "Physical properties of transparent and conducting sprayed fluorine doped zinc oxide thin films", Solid State Sciences, 10 (2008) 1209-1214. [DOI:10.1016/j.solidstatesciences.2007.11.031]

فایل ها

سابقه مقاله

  • تاریخ دریافت: 30 دی 1402
  • تاریخ بازنگری: 10 اسفند 1402
  • تاریخ پذیرش: 18 فروردین 1403

هم رسانی

ارجاع به این مقاله

آمار