لایه‌های نازک اکسید قلع آلاییده با فلوئور دارای شاخص شایستگی بالا رشدیافته به روش گرما کافت افشانه ای: اثر مقدار آلاینده بر ویژگی‌های فیزیکی

نوع مقاله : مقاله پژوهشی

نویسندگان

1 گروه فیزیک، دانشگاه صنعتی خاتم الانبیاء بهبهان، بهبهان، ایران

2 گروه فیزیک، دانشگاه گیلان، رشت، ایران

چکیده

لایه‌های نازک اکسید قلع آلاییده با فلوئور (FTO) با روش گرماکافت افشانه­ای روی بستر لام شیشه­ای رشد داده شدند. مقدار آلاینده فلوئور (نسبت اتمی [F]/[Sn]) در محلول پیش­ماده به ترتیب برابر با 0، 20، 30 و 40 درصد اتمی در نظر گرفته شد. با ورود F به ساختار SnO2، بافت لایه­های نازک دچار تغییراتی شد. این تغییرات عامل اصلی بهبود تحرک حامل­های بار تشخیص داده شد. بهبود تحرک حامل­های بار در کنار افزایش غلظت آنها در اثر جایگزینی O2- با F-، باعث افزایش قابل توجه رسانندگی در لایه­های آلاییده شد. آلاینده F همچنین باعث افزایش شفافیت و جابه­جایی لبه جذب لایه­های نازک FTO به سمت طول موج­های پایین­تر گردید. سرانجام لایه نازک FTO با آلاینده 30 درصد اتمی مقاومت ویژه Ω.cm 10-4×09/8، مقاومت سطحی Ω/sq 16 و متوسط عبور %47/87 را فراهم آورد که در نتیجه آن شاخص شایستگی 1-Ω 10-2×65/1 برای آن محاسبه گردید.

کلیدواژه‌ها

عنوان مقاله [English]

Spray-deposited fluorine doped tin oxide thin films with high figure of merit: the influence of doping concentration on the physical characteristics

نویسندگان [English]

  • Hassan Zare Asl 1
  • Seyed Mohammad Rozati 2
1 Department of Physics, Behbahan Khatam Alanbia University of Technology, Behbahan, Iran
2 Department of Physics, University of Guilan, Rasht, Iran
چکیده [English]

Fluorine (F)-doped tin oxide (FTO) thin films were spray-deposited onto soda lime glass substrate. The F doping concentration ([F]/[F]+[Sn] atomic ratio) varied from 0, 20, 30, and 40 at.% in the precursor solution. Due to the presence of the F in the SnO2 structure, the thin films texture was changed which was found to be in favor of mobility improvement. The mobility enhancement along with the carrier concentration raise, which result from substitution of O2- with F- that led to significant conductivity promotion in the doped thin films. Moreover, F doping caused transparency improvement and shift in the absorption edge towards lower wavelength in the prepared FTO thin films. Consequently, the FTO film derived from 30 at.% doping reached a resistivity, sheet resistance, and average transmittance of 2.08×10-1 Ω.cm, 16 Ω/sq, and 87.47%, respectively. The mentioned values provided a 1.65×10-2 Ω-1 of figure of merit for the FTO thin film.

کلیدواژه‌ها [English]

  • FTO thin film
  • doping
  • resistivity
  • transmittance
  • Figure of merit
  • Spray Pyrolysis

مراجع

  1. [1] Djessas, K., Bouchama, I., Gauffier, J.L., Ayadi, Z.B., "Effects of indium concentration on the properties of In-doped ZnO films: Applications to silicon wafer solar cells", Thin Solid Films 555 (2014) 28-32. [DOI:10.1016/j.tsf.2013.08.109]
  2. [1] Djessas, K., Bouchama, I., Gauffier, J.L., Ayadi, Z.B., "Effects of indium concentration on the properties of In-doped ZnO films: Applications to silicon wafer solar cells", Thin Solid Films 555 (2014) 28-32. [DOI:10.1016/j.tsf.2013.08.109]
  3. [2] Asl, H.Z., Rozati, S.M., "Some physical properties of n-IZO/p-CuO thin film heterojunction diodes completely made by spray pyrolysis", Journal of Materials Science: Materials in Electronics 29 (2018) 4365-4372. [DOI:10.1007/s10854-017-8385-1]
  4. [2] Asl, H.Z., Rozati, S.M., "Some physical properties of n-IZO/p-CuO thin film heterojunction diodes completely made by spray pyrolysis", Journal of Materials Science: Materials in Electronics 29 (2018) 4365-4372. [DOI:10.1007/s10854-017-8385-1]
  5. [3] Belaidi, A., Chaqour, S.M., Gorochov, O., Neumann-Spallart, M., "Photoelectrochemical and physical properties of titanium dioxide films obtained by aerosol pyrolysis", Materials Research Bulletin 39 (2004) 599-608. [DOI:10.1016/j.materresbull.2003.12.012]
  6. [3] Belaidi, A., Chaqour, S.M., Gorochov, O., Neumann-Spallart, M., "Photoelectrochemical and physical properties of titanium dioxide films obtained by aerosol pyrolysis", Materials Research Bulletin 39 (2004) 599-608. [DOI:10.1016/j.materresbull.2003.12.012]
  7. [4] Chu, J., Li, X., Cheng, Y., Xiong, S., "Electrochromic properties of Prussian Blue nanocube film directly grown on FTO substrates by hydrothermal method", Materials Letters 258 (2020) 126782. [DOI:10.1016/j.matlet.2019.126782]
  8. [4] Chu, J., Li, X., Cheng, Y., Xiong, S., "Electrochromic properties of Prussian Blue nanocube film directly grown on FTO substrates by hydrothermal method", Materials Letters 258 (2020) 126782. [DOI:10.1016/j.matlet.2019.126782]
  9. [5] Pakniyat, S., Motevalizadeh, L., Jami, S., "The effect of Ga-doping on the structural and optical properties of ZnO thin films prepared by spray pyrolysis (in Persian)", Iranian Journal of Crystallography and Mineralogy 27 (2019) 747-752. [DOI:10.29252/ijcm.27.3.747]
  10. [5] Pakniyat, S., Motevalizadeh, L., Jami, S., "The effect of Ga-doping on the structural and optical properties of ZnO thin films prepared by spray pyrolysis (in Persian)", Iranian Journal of Crystallography and Mineralogy 27 (2019) 747-752. [DOI:10.29252/ijcm.27.3.747]
  11. [6] Malekiyan, M., Fadavieslam, M., Ardyanian, m., "Investigation of the structural, optical and gas sensing properties of Aluminum doped zinc -oxide nanoparticles synthesized by solvo-thermal method", Iranian Journal of Crystallography and Mineralogy 27 (2019) 975-984. [DOI:10.29252/ijcm.27.4.975]
  12. [6] Malekiyan, M., Fadavieslam, M., Ardyanian, m., "Investigation of the structural, optical and gas sensing properties of Aluminum doped zinc -oxide nanoparticles synthesized by solvo-thermal method", Iranian Journal of Crystallography and Mineralogy 27 (2019) 975-984. [DOI:10.29252/ijcm.27.4.975]
  13. [7] Asl, H.Z., Rozati, S.M., "High-Performance Spray-Deposited Indium Doped ZnO Thin Film: Structural, Morphological, Electrical, Optical, and Photoluminescence Study", Journal of Electronic Materials 47 (2018) 3568-3576. [DOI:10.1007/s11664-018-6201-1]
  14. [7] Asl, H.Z., Rozati, S.M., "High-Performance Spray-Deposited Indium Doped ZnO Thin Film: Structural, Morphological, Electrical, Optical, and Photoluminescence Study", Journal of Electronic Materials 47 (2018) 3568-3576. [DOI:10.1007/s11664-018-6201-1]
  15. [8] Hinna, M., Hartiti, B., Gouya, A., Labrim, H., Fadili, S., Tahri, M., Belfhailli, A., Siadat, M., Thévenin, P., "Synthesis of ITO thin films by Spray pyrolysis based on Taguchi design", Materials Today: Proceedings 66 (2022) 447-455. [DOI:10.1016/j.matpr.2022.06.323]
  16. [8] Hinna, M., Hartiti, B., Gouya, A., Labrim, H., Fadili, S., Tahri, M., Belfhailli, A., Siadat, M., Thévenin, P., "Synthesis of ITO thin films by Spray pyrolysis based on Taguchi design", Materials Today: Proceedings 66 (2022) 447-455. [DOI:10.1016/j.matpr.2022.06.323]
  17. [9] Asl, H.Z., Rozati, S.M., "Influence of texture coefficient on the electrical properties of spray-deposited fluorine-doped tin oxide thin film", Journal of Materials Science: Materials in Electronics 32 (2021) 1668-1676. [DOI:10.1007/s10854-020-04936-w]
  18. [9] Asl, H.Z., Rozati, S.M., "Influence of texture coefficient on the electrical properties of spray-deposited fluorine-doped tin oxide thin film", Journal of Materials Science: Materials in Electronics 32 (2021) 1668-1676. [DOI:10.1007/s10854-020-04936-w]
  19. [10] Gordon, R.G., "Criteria for Choosing Transparent Conductors", MRS Bulletin 25 (2000) 52-57. [DOI:10.1557/mrs2000.151]
  20. [10] Gordon, R.G., "Criteria for Choosing Transparent Conductors", MRS Bulletin 25 (2000) 52-57. [DOI:10.1557/mrs2000.151]
  21. [11] Benhaoua, A., Rahal, A., Benhaoua, B., Jlassi, M., "Effect of fluorine doping on the structural, optical and electrical properties of SnO2 thin films prepared by spray ultrasonic", Superlattices and Microstructures 70 (2014) 61-69. [DOI:10.1016/j.spmi.2014.02.005]
  22. [11] Benhaoua, A., Rahal, A., Benhaoua, B., Jlassi, M., "Effect of fluorine doping on the structural, optical and electrical properties of SnO2 thin films prepared by spray ultrasonic", Superlattices and Microstructures 70 (2014) 61-69. [DOI:10.1016/j.spmi.2014.02.005]
  23. [12] Tuyen, L.T.C., Jian, S.-R., Tien, N.T., Le, P.H., "Nanomechanical and Material Properties of Fluorine-Doped Tin Oxide Thin Films Prepared by Ultrasonic Spray Pyrolysis: Effects of F-Doping", Materials 12 (2019) 1665. [DOI:10.3390/ma12101665]
  24. [12] Tuyen, L.T.C., Jian, S.-R., Tien, N.T., Le, P.H., "Nanomechanical and Material Properties of Fluorine-Doped Tin Oxide Thin Films Prepared by Ultrasonic Spray Pyrolysis: Effects of F-Doping", Materials 12 (2019) 1665. [DOI:10.3390/ma12101665]
  25. [13] Ramírez-Amador, R., Alvarado-Pulido, J.J., Martínez-Hernández, H.P., Cortes- Maldonado, R., Alcántara-Iniesta, S., Flores-Carrasco, G., Ojeda-Durán, E., Malik, O., Morales-de la Garza, L., Méndez-Rojas, M.Á., Panecatl-Bernal, Y., Luna-López, J.A., López-Salazar, P., "Study of fluorine-doped tin oxide thin films deposited by pneumatic spray pyrolysis and ultrasonic spray pyrolysis: a direct comparison", Materials Research Express 10 (2023) 066402. [DOI:10.1088/2053-1591/acda1a]
  26. [13] Ramírez-Amador, R., Alvarado-Pulido, J.J., Martínez-Hernández, H.P., Cortes- Maldonado, R., Alcántara-Iniesta, S., Flores-Carrasco, G., Ojeda-Durán, E., Malik, O., Morales-de la Garza, L., Méndez-Rojas, M.Á., Panecatl-Bernal, Y., Luna-López, J.A., López-Salazar, P., "Study of fluorine-doped tin oxide thin films deposited by pneumatic spray pyrolysis and ultrasonic spray pyrolysis: a direct comparison", Materials Research Express 10 (2023) 066402. [DOI:10.1088/2053-1591/acda1a]
  27. [14] Asl, H.Z., Rozati, S.M., "High-quality spray-deposited fluorine-doped tin oxide: effect of film thickness on structural, morphological, electrical, and optical properties", Applied Physics A 125 (2019) 689. [DOI:10.1007/s00339-019-2943-8]
  28. [14] Asl, H.Z., Rozati, S.M., "High-quality spray-deposited fluorine-doped tin oxide: effect of film thickness on structural, morphological, electrical, and optical properties", Applied Physics A 125 (2019) 689. [DOI:10.1007/s00339-019-2943-8]
  29. [15] Abdelkrim, A., Rahmane, S., Abdelouahab, O., Abdelmalek, N., Brahim, G., "Effect of solution concentration on the structural, optical and electrical properties of SnO 2 thin films prepared by spray pyrolysis", Optik - International Journal for Light and Electron Optics 127 (2016) 2653-2658. [DOI:10.1016/j.ijleo.2015.11.232]
  30. [15] Abdelkrim, A., Rahmane, S., Abdelouahab, O., Abdelmalek, N., Brahim, G., "Effect of solution concentration on the structural, optical and electrical properties of SnO 2 thin films prepared by spray pyrolysis", Optik - International Journal for Light and Electron Optics 127 (2016) 2653-2658. [DOI:10.1016/j.ijleo.2015.11.232]
  31. [16] Smith, A., Laurent, J.-M., Smith, D.S., Bonnet, J.-P., Clemente, R.R., "Relation between solution chemistry and morphology of SnO2-based thin films deposited by a pyrosol process", Thin Solid Films 266 (1995) 20-30.

    https://doi.org/10.1016/0040-6090(95)06648-9 [DOI:https://doi.org/10.1016/0040-6090(95)06648-9]
  32. [16] Smith, A., Laurent, J.-M., Smith, D.S., Bonnet, J.-P., Clemente, R.R., "Relation between solution chemistry and morphology of SnO2-based thin films deposited by a pyrosol process", Thin Solid Films 266 (1995) 20-30.

    https://doi.org/10.1016/0040-6090(95)06648-9 [DOI:https://doi.org/10.1016/0040-6090(95)06648-9]
  33. [17] Gaber, A., Attia, S.Y., Salem, A.M.S., Mohamed, S.G., El-Hout, S.I., "Microwave-assisted fabrication of SnO2 nanostructures as electrode for high-performance pseudocapacitors", Journal of Energy Storage 59 (2023) 106358. [DOI:10.1016/j.est.2022.106358]
  34. [17] Gaber, A., Attia, S.Y., Salem, A.M.S., Mohamed, S.G., El-Hout, S.I., "Microwave-assisted fabrication of SnO2 nanostructures as electrode for high-performance pseudocapacitors", Journal of Energy Storage 59 (2023) 106358. [DOI:10.1016/j.est.2022.106358]
  35. [18] Asl, H.Z., Rozati, S.M., "Photoluminescence and Optical Properties of CuO Thin Films Deposited via Spray Pyrolysis: Influence of Substrate Temperature", JTAP 18 (2024) 182421-182432. [DOI:10.57647/j.jtap.2024.1802.21]
  36. [18] Asl, H.Z., Rozati, S.M., "Photoluminescence and Optical Properties of CuO Thin Films Deposited via Spray Pyrolysis: Influence of Substrate Temperature", JTAP 18 (2024) 182421-182432. [DOI:10.57647/j.jtap.2024.1802.21]
  37. [19] Padmaja, B., Dhanapandian, S., Ashokkumar, K., Krishnakumar, N., "Cobalt ions doped SnO2 nanoparticles for enhanced photocatalytic and supercapacitor applications", Inorganic Chemistry Communications 155 (2023) 110948. [DOI:10.1016/j.inoche.2023.110948]
  38. [19] Padmaja, B., Dhanapandian, S., Ashokkumar, K., Krishnakumar, N., "Cobalt ions doped SnO2 nanoparticles for enhanced photocatalytic and supercapacitor applications", Inorganic Chemistry Communications 155 (2023) 110948. [DOI:10.1016/j.inoche.2023.110948]
  39. [20] Zhang, B., Tian, Y., Zhang, J.X., Cai, W., "The role of oxygen vacancy in fluorine-doped SnO2 films", Physica B: Condensed Matter 406 (2011) 1822-1826. [DOI:10.1016/j.physb.2011.02.037]
  40. [20] Zhang, B., Tian, Y., Zhang, J.X., Cai, W., "The role of oxygen vacancy in fluorine-doped SnO2 films", Physica B: Condensed Matter 406 (2011) 1822-1826. [DOI:10.1016/j.physb.2011.02.037]
  41. [21] Rozati, S.M., Seyed Hashemi, S.A., "Fabrication and characterization of physical and electrochemical properties of ZnO/ZnS and ZnO/ZnS/ZnO nanostructured composite thin films", Iranian Journal of Crystallography and Mineralogy 31 (2023) 795-810. [DOI:10.61186/ijcm.31.4.795]
  42. [21] Rozati, S.M., Seyed Hashemi, S.A., "Fabrication and characterization of physical and electrochemical properties of ZnO/ZnS and ZnO/ZnS/ZnO nanostructured composite thin films", Iranian Journal of Crystallography and Mineralogy 31 (2023) 795-810. [DOI:10.61186/ijcm.31.4.795]
  43. [22] Benhaoua, B., Abbas, S., Rahal, A., Benhaoua, A., Aida, M.S., "Effect of film thickness on the structural, optical and electrical properties of SnO2: F thin films prepared by spray ultrasonic for solar cells applications", Superlattices and Microstructures 83 (2015) 78-88. [DOI:10.1016/j.spmi.2015.03.017]
  44. [22] Benhaoua, B., Abbas, S., Rahal, A., Benhaoua, A., Aida, M.S., "Effect of film thickness on the structural, optical and electrical properties of SnO2: F thin films prepared by spray ultrasonic for solar cells applications", Superlattices and Microstructures 83 (2015) 78-88. [DOI:10.1016/j.spmi.2015.03.017]
  45. [23] Moholkar, A.V., Pawar, S.M., Rajpure, K.Y., Bhosale, C.H., Kim, J.H., "Effect of fluorine doping on highly transparent conductive spray deposited nanocrystalline tin oxide thin films", Applied Surface Science 255 (2009) 9358-9364. [DOI:10.1016/j.apsusc.2009.07.035]
  46. [23] Moholkar, A.V., Pawar, S.M., Rajpure, K.Y., Bhosale, C.H., Kim, J.H., "Effect of fluorine doping on highly transparent conductive spray deposited nanocrystalline tin oxide thin films", Applied Surface Science 255 (2009) 9358-9364. [DOI:10.1016/j.apsusc.2009.07.035]
  47. [24] Korotkov, R.Y., Ricou, P., Farran, A.J.E., "Preferred orientations in polycrystalline SnO2 films grown by atmospheric pressure chemical vapor deposition", Thin Solid Films 502 (2006) 79-87. [DOI:10.1016/j.tsf.2005.07.248]
  48. [24] Korotkov, R.Y., Ricou, P., Farran, A.J.E., "Preferred orientations in polycrystalline SnO2 films grown by atmospheric pressure chemical vapor deposition", Thin Solid Films 502 (2006) 79-87. [DOI:10.1016/j.tsf.2005.07.248]
  49. [25] Asl, H.Z., Rozati, S.M., "Spray-deposited CuO:In2O3 nanocomposite thin film: Enhancement in electrochemical performance", Journal of Alloys and Compounds 928 (2022) 167211. [DOI:10.1016/j.jallcom.2022.167211]
  50. [25] Asl, H.Z., Rozati, S.M., "Spray-deposited CuO:In2O3 nanocomposite thin film: Enhancement in electrochemical performance", Journal of Alloys and Compounds 928 (2022) 167211. [DOI:10.1016/j.jallcom.2022.167211]
  51. [26] Karthick, P., Saravanakumar, K., Sanjeeviraja, C., Jeyadheepan, K., "Realization of highly conducting and transparent SnO2 thin films by optimizing F/Sn molar ratio for electrochemical applications", Thin Solid Films 713 (2020) 138362. [DOI:10.1016/j.tsf.2020.138362]
  52. [26] Karthick, P., Saravanakumar, K., Sanjeeviraja, C., Jeyadheepan, K., "Realization of highly conducting and transparent SnO2 thin films by optimizing F/Sn molar ratio for electrochemical applications", Thin Solid Films 713 (2020) 138362. [DOI:10.1016/j.tsf.2020.138362]
  53. [27] Calnan, S., Tiwari, A.N., "High mobility transparent conducting oxides for thin film solar cells", Thin Solid Films 518 (2010) 1839-1849. [DOI:10.1016/j.tsf.2009.09.044]
  54. [27] Calnan, S., Tiwari, A.N., "High mobility transparent conducting oxides for thin film solar cells", Thin Solid Films 518 (2010) 1839-1849. [DOI:10.1016/j.tsf.2009.09.044]
  55. [28] Zhang, D.H., Ma, H.L., "Scattering mechanisms of charge carriers in transparent conducting oxide films", Applied Physics A 62 (1996) 487-492.

    https://doi.org/10.1007/BF01567122 [DOI:10.1007/bf01567122]
  56. [28] Zhang, D.H., Ma, H.L., "Scattering mechanisms of charge carriers in transparent conducting oxide films", Applied Physics A 62 (1996) 487-492.

    https://doi.org/10.1007/BF01567122 [DOI:10.1007/bf01567122]
  57. [29] Zhu, B.L., Liu, F., Li, K., Lv, K., Wu, J., Gan, Z.H., Liu, J., Zeng, D.W., Xie, C.S., "Sputtering deposition of transparent conductive F-doped SnO 2 (FTO) thin films in hydrogen-containing atmosphere", Ceramics International 43 (2017) 10288-10298. [DOI:10.1016/j.ceramint.2017.05.058]
  58. [29] Zhu, B.L., Liu, F., Li, K., Lv, K., Wu, J., Gan, Z.H., Liu, J., Zeng, D.W., Xie, C.S., "Sputtering deposition of transparent conductive F-doped SnO 2 (FTO) thin films in hydrogen-containing atmosphere", Ceramics International 43 (2017) 10288-10298. [DOI:10.1016/j.ceramint.2017.05.058]
  59. [30] Kumar, M., Kumar, A., Abhyankar, A.C., "Influence of texture coefficient on surface morphology and sensing properties of W-doped nanocrystalline tin oxide thin films", ACS applied materials & interfaces 7 (2015) 3571-3580. [DOI:10.1021/am507397z]
  60. [30] Kumar, M., Kumar, A., Abhyankar, A.C., "Influence of texture coefficient on surface morphology and sensing properties of W-doped nanocrystalline tin oxide thin films", ACS applied materials & interfaces 7 (2015) 3571-3580. [DOI:10.1021/am507397z]
  61. [31] Javadian, A., Fadavieslsm, M.R., "Effect of substrate temperatures, spray rates, solution volumes, and nickel concentration on structural and optical properties of NiO thin films prepared by spray pyrolysis", Iranian Journal of Crystallography and Mineralogy 31 (2023) 165-182. [DOI:10.52547/ijcm.31.1.165]
  62. [31] Javadian, A., Fadavieslsm, M.R., "Effect of substrate temperatures, spray rates, solution volumes, and nickel concentration on structural and optical properties of NiO thin films prepared by spray pyrolysis", Iranian Journal of Crystallography and Mineralogy 31 (2023) 165-182. [DOI:10.52547/ijcm.31.1.165]
  63. [32] Tajabor, N., Alinejad, M.R., Iranmanesh, P., "Preparation of SrTiO3 thin films by spray pyrolysis technique and study of their structural and optical properties (in Persian)", Iranian Journal of Crystallography and Mineralogy 16 (2008) 225-232.
  64. [32] Tajabor, N., Alinejad, M.R., Iranmanesh, P., "Preparation of SrTiO3 thin films by spray pyrolysis technique and study of their structural and optical properties (in Persian)", Iranian Journal of Crystallography and Mineralogy 16 (2008) 225-232.
  65. [33] Mahmoudi, T., Masoudi, M., "An experimental and theoretical study on the physical properties of Al doped ZnO thin films (in Persian)", Iranian Journal of Crystallography and Mineralogy 27 (2019) 487-494. [DOI:10.29252/ijcm.27.2.487]
  66. [33] Mahmoudi, T., Masoudi, M., "An experimental and theoretical study on the physical properties of Al doped ZnO thin films (in Persian)", Iranian Journal of Crystallography and Mineralogy 27 (2019) 487-494. [DOI:10.29252/ijcm.27.2.487]
  67. [34] Shinde, S.S., Shinde, P.S., Pawar, S.M., Moholkar, A.V., Bhosale, C.H., Rajpure, K.Y., "Physical properties of transparent and conducting sprayed fluorine doped zinc oxide thin films", Solid State Sciences 10 (2008) 1209-1214. [DOI:10.1016/j.solidstatesciences.2007.11.031]
  68. [34] Shinde, S.S., Shinde, P.S., Pawar, S.M., Moholkar, A.V., Bhosale, C.H., Rajpure, K.Y., "Physical properties of transparent and conducting sprayed fluorine doped zinc oxide thin films", Solid State Sciences 10 (2008) 1209-1214. [DOI:10.1016/j.solidstatesciences.2007.11.031]
  69. [35] Wang, L.K., Chen, J.J., Yu, J.Y., Zhao, H.L., Yang, J.K., "Highly textured spray-deposited SnO2:F films with high haze for solar cells", Vacuum 169 (2019) 108879. [DOI:10.1016/j.vacuum.2019.108879]
  70. [35] Wang, L.K., Chen, J.J., Yu, J.Y., Zhao, H.L., Yang, J.K., "Highly textured spray-deposited SnO2:F films with high haze for solar cells", Vacuum 169 (2019) 108879. [DOI:10.1016/j.vacuum.2019.108879]
  71. [36] Mahmoudiamirabad, Z., Eshghi, H., "Achievements of high figure of merit and infra-red reflectivity in SnO2:F thin films using spray pyrolysis technique", Superlattices and Microstructures 152 (2021) 106855. [DOI:10.1016/j.spmi.2021.106855]
  72. [36] Mahmoudiamirabad, Z., Eshghi, H., "Achievements of high figure of merit and infra-red reflectivity in SnO2:F thin films using spray pyrolysis technique", Superlattices and Microstructures 152 (2021) 106855. [DOI:10.1016/j.spmi.2021.106855]
  73. [37] Thomas, R., Mathavan, T., Ganesh, V., Yahia, I.S., Zahran, H.Y., AlFiafy, S., Kathalingam, A., "Investigation of erbium co-doping on fluorine doped tin oxide via nebulizer spray pyrolysis for optoelectronic applications", Optical and Quantum Electronics 52 (2020) 248. [DOI:10.1007/s11082-020-02376-8]
  74. [37] Thomas, R., Mathavan, T., Ganesh, V., Yahia, I.S., Zahran, H.Y., AlFiafy, S., Kathalingam, A., "Investigation of erbium co-doping on fluorine doped tin oxide via nebulizer spray pyrolysis for optoelectronic applications", Optical and Quantum Electronics 52 (2020) 248. [DOI:10.1007/s11082-020-02376-8]
  75. [38] Memarian, N., Rozati, S.M., Elamurugu, E., Fortunato, E., "Characterization of SnO2:F thin films deposited by an economic spray pyrolysis technique", physica status solidi (c) 7 (2010) 2277-2281.

    https://doi.org/10.1002/pssc.200983738 [DOI:10.1002/pssc.200983738.]
  76. [38] Memarian, N., Rozati, S.M., Elamurugu, E., Fortunato, E., "Characterization of SnO2:F thin films deposited by an economic spray pyrolysis technique", physica status solidi (c) 7 (2010) 2277-2281.

    https://doi.org/10.1002/pssc.200983738 [DOI:10.1002/pssc.200983738.]
مجله بلورشناسی و کانی شناسی ایران
دوره 33، شماره 1 - شماره پیاپی 97
فروردین 1404
صفحه 169-180

فایل ها

سابقه مقاله

  • تاریخ دریافت: 08 مرداد 1403
  • تاریخ بازنگری: 17 شهریور 1403
  • تاریخ پذیرش: 23 مهر 1403

هم رسانی

ارجاع به این مقاله

آمار