ریخت‌شناسی برخالی و چندبرخالی لایه‌های کربن شبه‌الماسی با آلایش نقره-نیتروژن

نوع مقاله : مقاله پژوهشی

نویسندگان

1 گروه علوم پایه، دانشگاه صنعتی بیرجند، بیرجند، ایران

2 گروه پژوهشی فناوری خلأ، جهاد دانشگاهی صنعتی شریف، تهران، ایران

3 گروه نانوفیزیک، دانشکده فیزیک، دانشگاه الزهرا، تهران، ایران

4 گروه فیزیک، واحد کرمانشاه، دانشگاه آزاد اسلامی، کرمانشاه، ایران

چکیده

امروزه لایه کربن شبه‌الماسی برای کاربردهای صنعتی و زیستی مورد توجه است، به طوریکه با وارد کردن ناخالصی (فلزی یا غیر فلزی) به آن، به دنبال ایجاد ویژگی های ساختار و مکانیکی جدیدی هستند. از اینرو در این پژوهش نانوذرات نقره در بستری از لایه نازک کربن شبه‌الماسی روی زیرلایه‌های مختلف فلزی با استفاده از روش همزمان کندوپاش پلاسمای بسامد رادیویی و انباشت بخار شیمیایی تهیه و مشخصه‌یابی شدند. لایه‌ها از هدف نقره در محیطی از ترکیب گازهای استیلن و نیتروژن و در فشارهای مختلف کاری ساخته شدند. ریختار (مورفولوژی) لایه‌ها با میکروسکوپ نیروی اتمی‌ (AFM) بر اساس استاندارد 25178-2: 2012 بررسی گردید و نتایج آماری به دست آمده از داده‌های AFM نشان داد که مکان نگاری سطح لایه‌ها در فشارهای مختلف با توجه به طبعیت زیرلایه، دستخوش تغییر شده است، بطوریکه نمونه‌های تهیه شده در فشار کاری 5/18 میلی تور بالاترین زبری سطح را نسبت به سایر نمونه‌ها داشتند. پس از آن ویژگی برخالی (فرکتالی) لایه‌های تهیه شده بصورت نظری بررسی گردید و مشخص شد که همه آنها ویژگی­های چندبرخالی (چندفرکتالی) دارند. نتایج بررسی چند برخالی لایه‌ها همخوانی خوبی با سایر داده‌های آماری AFM داشت. همچنین با کمک طیف­سنجی­های پراکندگی انرژی پرتوی ایکس (EDS) و رامان، تشکیل ساختار و وجود عناصر کربن، نیتروژن و نقره و وجود ساختار کربن شبه‌الماسی تایید شد.     

کلیدواژه‌ها

عنوان مقاله [English]

Fractal and multifractal morphology of diamond-like carbon films with Ag:N doping

نویسندگان [English]

  • Amir Zelati 1
  • Ali Arman 2
  • Azizollah Shafiekhani 3
  • Sahar Rezaee 4
1 Department of Basic Sciences, Birjand University of Technology, Birjand, Iran
2 ACECR, Vacuum Technology Research Group, Sharif University Branch, Tehran, Iran
3 Department of Nanophysics, Faculty of Physics, Alzahra University, Vanak, Tehran, 19938-91176, Iran
4 Department of Physics, Kermanshah Branch, Islamic Azad University, Kermanshah, Iran
چکیده [English]

Nowadays, the use of diamond-like carbon films has been considered for industrial and biological applications, so in today's research, by introducing impurities (metallic or non-metallic), they are looking for new structural and mechanical properties. Therefore, this research discussed the fabrication and characterization of silver nanoparticles in a diamond-like carbon (DLC) thin film bed on various metal substrates using the simultaneous radio frequency plasma sputtering and chemical vapour deposition method. Therefore, the films were fabricated from the silver target in an environment of a combination of acetylene and nitrogen gases at different working pressures. The morphology of the film was examined using an atomic force microscope (AFM) according to the standard 25178-2: 2012, and the statistical results obtained from the AFM data showed that the surface topography of the film at different pressures changed according to the substrate nature so that the samples prepared at a working pressure of 18.5 mTorr had the highest surface roughness compared to other samples. After that, the fractal properties of the prepared films were theoretically checked, and all the films have multi-fractal properties—the results of the multi-fractal analysis of the film satisfactorily complied with other AFM statistical data. Moreover, with the help of EDS and Raman analysis, the structure formation, the presence of carbon, nitrogen, and silver elements, and the existence of a carbon-like structure were confirmed.

کلیدواژه‌ها [English]

  • morphology
  • fractal
  • Diamond-like carbon
  • AFM

مراجع

  1. [1] KN Chopra and AK Maini, "Thin Film and Their Applications in Military and Civil Sectors", Defence Research and Development Organisation. ISBN-13: ‎978-8186514320 (2010).
  2. [1] KN Chopra and AK Maini, "Thin Film and Their Applications in Military and Civil Sectors", Defence Research and Development Organisation. ISBN-13: ‎978-8186514320 (2010).
  3. [2] Zelati A., "Multifractal and optical characterization of silver nanoparticles embedded in carbon films prepared in C2H2+ N2 gas mixtures", The European Physical Journal Plus, 137(9), 1084, 2022. [DOI:10.1140/epjp/s13360-022-03307-0]
  4. [2] Zelati A., "Multifractal and optical characterization of silver nanoparticles embedded in carbon films prepared in C2H2+ N2 gas mixtures", The European Physical Journal Plus, 137(9), 1084, 2022. [DOI:10.1140/epjp/s13360-022-03307-0]
  5. [3] Croes M., Akhavan B., Sharifahmadian O., Fan H., Mertens R., Tan R.P., Chunara A., Fadzil A.A., Wise S.G., Kruyt M.C., Wijdicks S., Hennink W.E., Bilek M.M.M., Yavari S.A., "A multifaceted biomimetic interface to improve the longevity of orthopedic implants", Acta Biomaterialia, 110, 2020, 266-279. [DOI:10.1016/j.actbio.2020.04.020]
  6. [3] Croes M., Akhavan B., Sharifahmadian O., Fan H., Mertens R., Tan R.P., Chunara A., Fadzil A.A., Wise S.G., Kruyt M.C., Wijdicks S., Hennink W.E., Bilek M.M.M., Yavari S.A., "A multifaceted biomimetic interface to improve the longevity of orthopedic implants", Acta Biomaterialia, 110, 2020, 266-279. [DOI:10.1016/j.actbio.2020.04.020]
  7. [4] Farnood A., Ranjbar M., Azarian M., Salamati H., "Hydrogen sensing by plasmon decoupling effect in nanostructured Pd/Au films", International Journal of Hydrogen Energy, 47(32), 14759-14765, 2022. [DOI:10.1016/j.ijhydene.2022.02.213]
  8. [4] Farnood A., Ranjbar M., Azarian M., Salamati H., "Hydrogen sensing by plasmon decoupling effect in nanostructured Pd/Au films", International Journal of Hydrogen Energy, 47(32), 14759-14765, 2022. [DOI:10.1016/j.ijhydene.2022.02.213]
  9. [5] Habibi M., Mirzaei S., Arman A., Jurečka S., Sadeghi S., Zelati A., Shakoury A., Tanhaee E., Ghobadi N., Ehteram H., Ţălu Ş., "Microstructure, fractal geometry and corrosion properties of CrN thin films: The effect of shot number and angular position", Materials Today Communications, 32, 104072, 2022. [DOI:10.1016/j.mtcomm.2022.104072]
  10. [5] Habibi M., Mirzaei S., Arman A., Jurečka S., Sadeghi S., Zelati A., Shakoury A., Tanhaee E., Ghobadi N., Ehteram H., Ţălu Ş., "Microstructure, fractal geometry and corrosion properties of CrN thin films: The effect of shot number and angular position", Materials Today Communications, 32, 104072, 2022. [DOI:10.1016/j.mtcomm.2022.104072]
  11. [6] Ghobadi N., Arman A., Sadeghi M., Luna C., Mirzaei S., Zelati A., Shakoury R., "Optical transitions and photocatalytic activity of NiSe films prepared by the chemical solution deposition method", The European Physical Journal Plus, 137(6), 661, 2022. [DOI:10.1140/epjp/s13360-022-02879-1]
  12. [6] Ghobadi N., Arman A., Sadeghi M., Luna C., Mirzaei S., Zelati A., Shakoury R., "Optical transitions and photocatalytic activity of NiSe films prepared by the chemical solution deposition method", The European Physical Journal Plus, 137(6), 661, 2022. [DOI:10.1140/epjp/s13360-022-02879-1]
  13. [7] Astinchap B., Ghanbaripour H., Amuzgar R., "Multifractal study of TiO2 thin films deposited by MO-CVD method: The role of precursor amount and substrate temperature", Optik, 222, 165384, 2021. [DOI:10.1016/j.ijleo.2020.165384]
  14. [7] Astinchap B., Ghanbaripour H., Amuzgar R., "Multifractal study of TiO2 thin films deposited by MO-CVD method: The role of precursor amount and substrate temperature", Optik, 222, 165384, 2021. [DOI:10.1016/j.ijleo.2020.165384]
  15. [8] Fattahi M., Nezafat N.B., ŢăluŞ., Solaymani S., Ghoranneviss S., Elahi S.M., Shafiekhani A., Rezaee S., "Topographic characterization of zirconia-based ceramics by atomic force microscopy: A case study on different laser irradiations", Journal of Alloys and Compounds, 831, 154763, 2020. [DOI:10.1016/j.jallcom.2020.154763]
  16. [8] Fattahi M., Nezafat N.B., ŢăluŞ., Solaymani S., Ghoranneviss S., Elahi S.M., Shafiekhani A., Rezaee S., "Topographic characterization of zirconia-based ceramics by atomic force microscopy: A case study on different laser irradiations", Journal of Alloys and Compounds, 831, 154763, 2020. [DOI:10.1016/j.jallcom.2020.154763]
  17. [9] Habibi S., Sadeghi M., Arman A., Sobola A., Luna C., Mirzaei C., Zelati C., Filho H.D.d.F., ŢăluŞ., "Corrosion resistance and surface microstructure of Mg3N2/SS thin films by plasma focus instrument", Microscopy research, and technique, 85(8), 2880-2893, 2022. [DOI:10.1002/jemt.24138]
  18. [9] Habibi S., Sadeghi M., Arman A., Sobola A., Luna C., Mirzaei C., Zelati C., Filho H.D.d.F., ŢăluŞ., "Corrosion resistance and surface microstructure of Mg3N2/SS thin films by plasma focus instrument", Microscopy research, and technique, 85(8), 2880-2893, 2022. [DOI:10.1002/jemt.24138]
  19. [10] Czaja P., Boochani A., Przewoźnik J., Yeganeh M., Zelati A., Yari A., Amiri A., Naderi S., Fitta M., Duraczyńska D., Serwicka E.M., Stan-Głowińska E.M., Lityńska-Dobrzyńska L., "Microstructure, catalytic activity, magnetic and electronic properties of Ni3Al, Ni3Ga and Ni3Sn melt spun intermetallics from experimental and DFT computational standpoints", Journal of Alloys and Compounds, 927, 167076, 2022. [DOI:10.1016/j.jallcom.2022.167076]
  20. [10] Czaja P., Boochani A., Przewoźnik J., Yeganeh M., Zelati A., Yari A., Amiri A., Naderi S., Fitta M., Duraczyńska D., Serwicka E.M., Stan-Głowińska E.M., Lityńska-Dobrzyńska L., "Microstructure, catalytic activity, magnetic and electronic properties of Ni3Al, Ni3Ga and Ni3Sn melt spun intermetallics from experimental and DFT computational standpoints", Journal of Alloys and Compounds, 927, 167076, 2022. [DOI:10.1016/j.jallcom.2022.167076]
  21. [11] Tabrizi A.T., Aghajani H., Laleh F.F., "Tribological study of thin-electroplated chromium: evaluation of Wear rate as a function of surface roughness", Experimental Techniques, 419, 127317, 2021. [DOI:10.1016/j.surfcoat.2021.127317]
  22. [11] Tabrizi A.T., Aghajani H., Laleh F.F., "Tribological study of thin-electroplated chromium: evaluation of Wear rate as a function of surface roughness", Experimental Techniques, 419, 127317, 2021. [DOI:10.1016/j.surfcoat.2021.127317]
  23. [12] Rezaee S., Arman A., Jurečka S, Korpi A.G., Mwema F., Luna C., Sobola D., Kulesza S., Shakoury R., Bramowicz M., Ahmadpourian M., "Effect of annealing on the micromorphology and corrosion properties of Ti/SS thin films", Superlattices, and Microstructures, 146, 106681, 2020. [DOI:10.1016/j.spmi.2020.106681]
  24. [12] Rezaee S., Arman A., Jurečka S, Korpi A.G., Mwema F., Luna C., Sobola D., Kulesza S., Shakoury R., Bramowicz M., Ahmadpourian M., "Effect of annealing on the micromorphology and corrosion properties of Ti/SS thin films", Superlattices, and Microstructures, 146, 106681, 2020. [DOI:10.1016/j.spmi.2020.106681]
  25. [13] Salehi M., Amraee Rad G., Hafezi F., Arman A., Bonjakhi M., "Deep Reactive Etching of Silica with SF6/H2 Plasma: Variation of process parameters and microstructural studies", Vakuum in Forschung und Praxis, 33(2), 40-44, 2021. [DOI:10.1002/vipr.202100756]
  26. [13] Salehi M., Amraee Rad G., Hafezi F., Arman A., Bonjakhi M., "Deep Reactive Etching of Silica with SF6/H2 Plasma: Variation of process parameters and microstructural studies", Vakuum in Forschung und Praxis, 33(2), 40-44, 2021. [DOI:10.1002/vipr.202100756]
  27. [14] Nečas D., Klapetek P., "Gwyddion: An open-source software for SPM data analysis," Cent. Eur. J. Phys., vol. 10, no. 1, pp. 181-188, 2012, doi: 10.2478/s11534-011-0096-2. [DOI:10.2478/s11534-011-0096-2]
  28. [14] Nečas D., Klapetek P., "Gwyddion: An open-source software for SPM data analysis," Cent. Eur. J. Phys., vol. 10, no. 1, pp. 181-188, 2012, doi: 10.2478/s11534-011-0096-2. [DOI:10.2478/s11534-011-0096-2]
  29. [15] Mwema F.M., Jen T-C., Kaspar P., "Fractal Theory in Thin Films: Literature Review and Bibliometric Evidence on Applications and Trends", Fractal and Fractional, 6(9), 489, 2022. [DOI:10.3390/fractalfract6090489]
  30. [15] Mwema F.M., Jen T-C., Kaspar P., "Fractal Theory in Thin Films: Literature Review and Bibliometric Evidence on Applications and Trends", Fractal and Fractional, 6(9), 489, 2022. [DOI:10.3390/fractalfract6090489]
  31. [16] Sadeghi M., Arman A., Ţălu Ş., Korpi A.G., Shakoury R., Zelati R., Filho H.D.d.F., "Influence of ion implantation on corrosion resistance of the nickel over steel", Materials Science and Technology, 2022. [DOI:10.1080/02670836.2022.2131127]
  32. [16] Sadeghi M., Arman A., Ţălu Ş., Korpi A.G., Shakoury R., Zelati R., Filho H.D.d.F., "Influence of ion implantation on corrosion resistance of the nickel over steel", Materials Science and Technology, 2022. [DOI:10.1080/02670836.2022.2131127]
  33. [17] Ghaderi A., Shafiekhani A., Solaymani S., Ţălu Ş., Filho H.D.d.F., Ferreira N.S., Matos R.S., Zahrabi H., Dejam L., "Advanced microstructure, morphology and CO gas sensor properties of Cu/Ni bilayers at nanoscale", 12(1), 2022. [DOI:10.1038/s41598-022-16347-4]
  34. [17] Ghaderi A., Shafiekhani A., Solaymani S., Ţălu Ş., Filho H.D.d.F., Ferreira N.S., Matos R.S., Zahrabi H., Dejam L., "Advanced microstructure, morphology and CO gas sensor properties of Cu/Ni bilayers at nanoscale", 12(1), 2022. [DOI:10.1038/s41598-022-16347-4]
  35. [18] Ţălu Ş., Luna C., Ahmadpourian A., Achour A., Arman A., Naderi S., Ghobadi N., Stach N., Safibonab B., "Micromorphology and fractal analysis of nickel-carbon composite thin films", Journal of Materials Science: Materials in Electronics, 27(11), 11425-11431, 2016. [DOI:10.1007/s10854-016-5268-9]
  36. [18] Ţălu Ş., Luna C., Ahmadpourian A., Achour A., Arman A., Naderi S., Ghobadi N., Stach N., Safibonab B., "Micromorphology and fractal analysis of nickel-carbon composite thin films", Journal of Materials Science: Materials in Electronics, 27(11), 11425-11431, 2016. [DOI:10.1007/s10854-016-5268-9]
  37. [19] Ahmadpourian A., Luna C., Boochani A., Arman A., Achour A., Rezaee S., Naderi S., "The effects of deposition time on surface morphology, structural, electrical and optical properties of sputtered Ag-Cu thin films", The European Physical Journal Plus, 131(10), 2016. [DOI:10.1140/epjp/i2016-16381-2]
  38. [19] Ahmadpourian A., Luna C., Boochani A., Arman A., Achour A., Rezaee S., Naderi S., "The effects of deposition time on surface morphology, structural, electrical and optical properties of sputtered Ag-Cu thin films", The European Physical Journal Plus, 131(10), 2016. [DOI:10.1140/epjp/i2016-16381-2]
  39. [20] Ţălu Ş., Astinchap B., Abdolghaderi S., Shafiekhani A., Morozov I.A., "Multifractal investigation of Ag/DLC nanocomposite thin films", Scientific Reports, 10(1), 2020. [DOI:10.1038/s41598-020-79455-z]
  40. [20] Ţălu Ş., Astinchap B., Abdolghaderi S., Shafiekhani A., Morozov I.A., "Multifractal investigation of Ag/DLC nanocomposite thin films", Scientific Reports, 10(1), 2020. [DOI:10.1038/s41598-020-79455-z]
  41. [21] Molamohammadi M., Arman A., Achour A., Astinchap B., Ahmadpourian A., Boochani A., Naderi S., Ahmadpourian A., "Microstructure and optical properties of cobalt-carbon nanocomposites prepared by RF-sputtering", Journal of Materials Science: Materials in Electronics, 26(8), 2015. [DOI:10.1007/s10854-015-3170-5]
  42. [21] Molamohammadi M., Arman A., Achour A., Astinchap B., Ahmadpourian A., Boochani A., Naderi S., Ahmadpourian A., "Microstructure and optical properties of cobalt-carbon nanocomposites prepared by RF-sputtering", Journal of Materials Science: Materials in Electronics, 26(8), 2015. [DOI:10.1007/s10854-015-3170-5]
  43. [22] Modabberasl A., Kameli P., Ranjbar M., Salamati H., Ashiri R., "Fabrication of DLC thin films with improved diamond-like carbon character by the application of external magnetic field, Carbon", 94, 485-493, 2015. [DOI:10.1016/j.carbon.2015.06.081]
  44. [22] Modabberasl A., Kameli P., Ranjbar M., Salamati H., Ashiri R., "Fabrication of DLC thin films with improved diamond-like carbon character by the application of external magnetic field, Carbon", 94, 485-493, 2015. [DOI:10.1016/j.carbon.2015.06.081]
  45. [23] Aghamir F.M., Momen-Baghdadabad A.R., Shafiekhani A., Abdolshah A., "Comparison of formation of carbon on aluminum and graphite substrates by a low energy plasma focus device", Surfaces, and Interfaces, 26, 101414, 2021. [DOI:10.1016/j.surfin.2021.101414]
  46. [23] Aghamir F.M., Momen-Baghdadabad A.R., Shafiekhani A., Abdolshah A., "Comparison of formation of carbon on aluminum and graphite substrates by a low energy plasma focus device", Surfaces, and Interfaces, 26, 101414, 2021. [DOI:10.1016/j.surfin.2021.101414]
  47. [24] Ghodselahi T., Vesaghi M.A., Gelali A., Zahrabi H., Solaymani S., "Morphology, optical and electrical properties of Cu-Ni nanoparticles in aC: H prepared by co-deposition of RF-sputtering and RF-PECVD", Applied surface science, 258(2), 727-731, 2011. [DOI:10.1016/j.apsusc.2011.07.145]
  48. [24] Ghodselahi T., Vesaghi M.A., Gelali A., Zahrabi H., Solaymani S., "Morphology, optical and electrical properties of Cu-Ni nanoparticles in aC: H prepared by co-deposition of RF-sputtering and RF-PECVD", Applied surface science, 258(2), 727-731, 2011. [DOI:10.1016/j.apsusc.2011.07.145]
  49. [25] Zeng Q., Ning Z., "High-temperature tribological properties of diamond-like carbon films: A review, Reviews on Advanced Materials Science", 60,(2021)276-292. [DOI:10.1515/rams-2021-0028]
  50. [25] Zeng Q., Ning Z., "High-temperature tribological properties of diamond-like carbon films: A review, Reviews on Advanced Materials Science", 60,(2021)276-292. [DOI:10.1515/rams-2021-0028]
  51. [26] Zhang M., Xie T., Qian X., Zhu Y., Liu X., "Mechanical Properties and Biocompatibility of Ti-doped Diamond-like Carbon Films, ACS Omega", 5, 36, (2020),22772-22777. [DOI:10.1021/acsomega.0c01715]
  52. [26] Zhang M., Xie T., Qian X., Zhu Y., Liu X., "Mechanical Properties and Biocompatibility of Ti-doped Diamond-like Carbon Films, ACS Omega", 5, 36, (2020),22772-22777. [DOI:10.1021/acsomega.0c01715]
  53. [27] Zarei Ar., Shafiekhani A., "Surface-enhanced Raman scattering (SERS) of Methyl Orange on Ag-DLC nanoparticles", Materials Chemistry and Physics, 242, (2020), 122559. [DOI:10.1016/j.matchemphys.2019.122559]
  54. [27] Zarei Ar., Shafiekhani A., "Surface-enhanced Raman scattering (SERS) of Methyl Orange on Ag-DLC nanoparticles", Materials Chemistry and Physics, 242, (2020), 122559. [DOI:10.1016/j.matchemphys.2019.122559]
  55. [28] Rajak D. K., Kumar A., Behera A., Menezes P.L., "Diamond-Like Carbon (DLC) Coatings: Classification", Properties, and Applications, Appl. Sci.11(10), (2021),4445; [DOI:10.3390/app11104445]
  56. [28] Rajak D. K., Kumar A., Behera A., Menezes P.L., "Diamond-Like Carbon (DLC) Coatings: Classification", Properties, and Applications, Appl. Sci.11(10), (2021),4445; [DOI:10.3390/app11104445]
  57. [29] Ghodselahi T., Arman A., "Magnetoresistance of Cu-Ni nanoparticles in hydrogenated amorphous carbon thin films", Journal of Materials Science: Materials in Electronics, 26(6), 4193-4197, 2015. [DOI:10.1007/s10854-015-2965-8]
  58. [29] Ghodselahi T., Arman A., "Magnetoresistance of Cu-Ni nanoparticles in hydrogenated amorphous carbon thin films", Journal of Materials Science: Materials in Electronics, 26(6), 4193-4197, 2015. [DOI:10.1007/s10854-015-2965-8]
  59. [30] Sharifahmadian O., Zhai C., Hung J., Shineh G., Stewart C.A.C, Fadzil A.A., Ionescu M., Gan Y., Wise S.G., Akhavan B., "Mechanically robust nitrogen-rich plasma polymers: Biofunctional interfaces for surface engineering of biomedical implants", Materials Today Advances, 12, 2021, 100188. [DOI:10.1016/j.mtadv.2021.100188]
  60. [30] Sharifahmadian O., Zhai C., Hung J., Shineh G., Stewart C.A.C, Fadzil A.A., Ionescu M., Gan Y., Wise S.G., Akhavan B., "Mechanically robust nitrogen-rich plasma polymers: Biofunctional interfaces for surface engineering of biomedical implants", Materials Today Advances, 12, 2021, 100188. [DOI:10.1016/j.mtadv.2021.100188]
  61. [31] Hekmat M., Rostamian F., Shafiekhani A., "Improving solar cells characteristics by tuning the density distribution of deep trapping states using Au@ DLC decorated on photoanodes", Materials Science in Semiconductor Processing, 158, (2021), 105782. [DOI:10.1016/j.mssp.2021.105782]
  62. [31] Hekmat M., Rostamian F., Shafiekhani A., "Improving solar cells characteristics by tuning the density distribution of deep trapping states using Au@ DLC decorated on photoanodes", Materials Science in Semiconductor Processing, 158, (2021), 105782. [DOI:10.1016/j.mssp.2021.105782]
  63. [32] Shakoury R., Arman A., Ţălu Ş., Ghosh K., Rezaee S., Luna C., Mwema F., Sherafat K., Salehi M., Mardani M., "Optical properties, microstructure, and multifractal analyses of ZnS thin films obtained by RF magnetron sputtering", 31(7), 5262-5273, 2020. [DOI:10.1007/s10854-020-03086-3]
  64. [32] Shakoury R., Arman A., Ţălu Ş., Ghosh K., Rezaee S., Luna C., Mwema F., Sherafat K., Salehi M., Mardani M., "Optical properties, microstructure, and multifractal analyses of ZnS thin films obtained by RF magnetron sputtering", 31(7), 5262-5273, 2020. [DOI:10.1007/s10854-020-03086-3]
  65. [33] Astinchap B., Awrang S.M., Norian E., "Surface characterization of NiO thin films deposited by RF‐magnetron sputtering at different thickness: Statistical and multifractal approach", Microscopy Research and Technique, 85(9), 3056-3068 , 2022. [DOI:10.1002/jemt.24165]
  66. [33] Astinchap B., Awrang S.M., Norian E., "Surface characterization of NiO thin films deposited by RF‐magnetron sputtering at different thickness: Statistical and multifractal approach", Microscopy Research and Technique, 85(9), 3056-3068 , 2022. [DOI:10.1002/jemt.24165]
  67. [34] Ma C., Wang W., Li S., Miao C., Zhang Q., "Multifractal, structural, and optical properties of Mn-doped ZnO films", Applied Surface Science, 261 231-236, 2012. [DOI:10.1016/j.apsusc.2012.07.150]
  68. [34] Ma C., Wang W., Li S., Miao C., Zhang Q., "Multifractal, structural, and optical properties of Mn-doped ZnO films", Applied Surface Science, 261 231-236, 2012. [DOI:10.1016/j.apsusc.2012.07.150]
  69. [35] Ţălu Ş., Stach S., Ghodselahi T., Ghaderi A., Solaymani S., Boochani A., Garczyk Ż., "Topographic characterization of Cu-Ni NPs@ aC: H films by AFM and multifractal analysis", The Journal of Physical Chemistry B, 119(17), 5662-5670, 2015. [DOI:10.1021/acs.jpcb.5b00042]
  70. [35] Ţălu Ş., Stach S., Ghodselahi T., Ghaderi A., Solaymani S., Boochani A., Garczyk Ż., "Topographic characterization of Cu-Ni NPs@ aC: H films by AFM and multifractal analysis", The Journal of Physical Chemistry B, 119(17), 5662-5670, 2015. [DOI:10.1021/acs.jpcb.5b00042]
  71. [36] Nilkar M., Ghodsi F.E., Jafari S., Thiry D., Snyders R., "Effects of nitrogen incorporation on N-doped DLC thin film electrodes fabricated by dielectric barrier discharge plasma: Structural evolution and electrochemical performances", Journal of Alloys and Compounds, 853, 157298 (2021). [DOI:10.1016/j.jallcom.2020.157298]
  72. [36] Nilkar M., Ghodsi F.E., Jafari S., Thiry D., Snyders R., "Effects of nitrogen incorporation on N-doped DLC thin film electrodes fabricated by dielectric barrier discharge plasma: Structural evolution and electrochemical performances", Journal of Alloys and Compounds, 853, 157298 (2021). [DOI:10.1016/j.jallcom.2020.157298]

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  • تاریخ دریافت: 30 مهر 1401
  • تاریخ بازنگری: 13 دی 1401
  • تاریخ پذیرش: 28 دی 1401

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