لایه ‌نشانی و مشخصه‌یابی لایه‌‌های نازک SnO2:Sb تهیه شده به روش اسپری پایرولیزیز

نوع مقاله : مقاله پژوهشی

نویسنده

دانشگاه دامغان

چکیده

در این مطالعه لایه­های نازک نیمرسانای شفاف اکسید قلع آلاییده با ناخالصی آنتیموان بر روی زیر لایه­های شیشه­ای با غلظت­های متفاوت آنتیموان به روش اسپری پایرولیزیز تهیه شده­اند. اثر غلظت­های مختلف  آنتیموان بر خواص ساختاری، اپتیکی و الکتریکی لایه­های نازک مورد مطالعه قرار گرفت. لایه­های تهیه شده توسط پراش پرتو ایکس (XRD)، میکروسکوپ الکترونی روبشی اثر میدان (FESEM) و جذب نوری (UV-vis) مشخصه­یابی شدند. آنالیز XRD نشان داد که نمونه­ها دارای ساختار بس­بلور با جهت­گیری­های ارجح صفحات (110)، (101)، (200)، (211) و (301) مربوط به فاز اکسید قلع می­باشند. اندازه بلورک­ها و  دانه­ها با افزایش غلظت آنتیموان به ترتیب روندهای کاهشی و افزایشی نشان دادند. مطالعات نوری نمونه­ها نشان داد که افزایش غلظت آنتیموان سبب کاهش عبور در گستره نور مرئی از 72% به 15% و گاف نوری از72/3 به eV 98/2 ­شد. افزایش ناخالصی آنتیموان موجب رفتار کاهشی- افزایشی مقاومت الکتریکی شد. مطالعه ترموالکتریک نمونه­ها، رسانش نوع n را نشان داد.    

کلیدواژه‌ها

عنوان مقاله [English]

Deposition and characterization of SnO2:Sb thin films fabricated by the spray pyrolysis method

نویسنده [English]

  • Fadavieslam
Damghan University
چکیده [English]

In this study, thin films of transparent semiconductor tin oxide doped with antimony impurities on the glass substrates with different concentrations of antimony that have been prepared using spray pyrolysis method. The effects of different concentration of antimony on the structural, optical, and electrical properties of the thin films were investigated. Prepared layers were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM) and optical absorption (UV-vis). XRD analysis showed that samples have polycrystalline with orientations (110), (101), (200), (211) and (301) that was related to tin oxide phase. With increasing concentrations of antimony overall average size of nano-crystalline grains increased and the average grain size increased-decreased. Optical studies of samples showed that, increasing of antimony concentration caused reduction of transmission in the range of visible light from 72% to 15% and the optical band gap from 3.72 to 2.98 eV. Increasing of antimony concentration led to increasing-decreasing behavior of electrical resistance. Thermoelectric studies of samples revealed n-type conductivity in them.

کلیدواژه‌ها [English]

  • thin film
  • tin oxide
  • antimony impurity

مراجع

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  • تاریخ دریافت: 12 آبان 1397
  • تاریخ بازنگری: 07 دی 1397
  • تاریخ پذیرش: 24 بهمن 1397

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